Digital data apparatuses and digital data operational methods

ABSTRACT

Digital data apparatuses and digital data operational methods are described. According to one embodiment, a digital data apparatus includes a semiconductive substrate comprising a node location configured to receive an electrical charge of a single bit of digital information, a first capacitor coupled with the node location and configured to store a first portion of the electrical charge of the single bit of digital information, wherein the first capacitor comprises a first type of capacitive structure, a second capacitor coupled with the node location and configured to store a second portion of the electrical charge of the single bit of digital information, wherein the second capacitor comprises a second type of capacitive structure different than the first type of capacitive structure, and a transistor coupled with the node location and configured to control a flow of the first and second portions of the electrical charge of the single bit of digital information with respect to the node location and respective ones of the first and the second capacitors.

TECHNICAL FIELD

This invention relates to digital data apparatuses and digital dataoperational methods.

BACKGROUND OF THE INVENTION

Modern high density dynamic memory structures (e.g., dynamic randomaccess memory or DRAM) are based upon a single device plus capacitorstorage concept described in U.S. Pat. No. 3,387,282. The firstimplementation of which used planar capacitors and transistors. Anexample of one structure using planar structures is shown in FIG. 1. Thememory structures 10 individually include interlayer dielectric material11, a bitline 12, a bitline contact 13, an n-well of a semiconductivesubstrate 14, p+ active areas 15, a wordline 16, gate polysilicon 17,and gate oxide 18. These structures led to dramatic increases in memorydensity and decreases in per bit cost. As the density of DRAM increases,the space available for capacitors is reduced.

The desire for devices of increased density and sufficient capacitanceled to the development of new memory structures. Referring to FIGS. 2and 3, examples of more recently developed devices are shown. FIG. 2shows exemplary stacked capacitor memory structures 20 individuallycomprising interlayer dielectric material 21, a bitline 22, a bitlinecontact 23, a p-substrate 24, n+ active areas 25, a wordline 26, fieldpolysilicon 27, field oxide 28, and cell plates 29.

FIG. 3 shows exemplary trench capacitor memory structures 30individually comprising interlayer dielectric material 31, a bitline 32,a bitline contact 33, a p-substrate or well 34, n+ active areas 35, awordline 36, field polysilicon 37, field oxide 38, a polysilicon strap39, a polysilicon storage node 40, ONC dielectric 41, and a heavilydoped substrate region 42. The structures of FIGS. 2 and 3 permitted theuse of a vertical capacitor which led to continued increase in densityfor several generations of DRAM design.

The progress however was not without a cost. The minimum capacitancerequired for effective electrical operation does not scale with thereduction in achievable photolithographic dimensions (i.e., the size ofthe capacitor (area) remains relatively constant). To achieve this whilereducing the total size of the cell resulted in either an increase inthe vertical dimension of the capacitor while the horizontal dimensionswere decreased and/or required the thickness of the dielectric to bedecreased. Thus, trench capacitors having increasing depth became moredifficult to build. Stacked capacitors grew taller and led to processesto roughen the surface (thereby increasing the capacitor area). Theseimprovements including increasing the height of the capacitor structuresled to difficulties in producing wiring layers above the capacitorstructures along with very high aspect ratio contacts. Proposals havebeen made to use dielectrics other than Nitride-Oxide combinationstypically used. However, these proposals have proved difficult toimpossible to implement. There is a desire to increase the spaceavailable for construction of the capacitor while at the same timereducing the total cell area.

BRIEF DESCRIPTION OF THE DRAWINGS

Preferred embodiments of the invention are described below withreference to the following accompanying drawings.

FIG. 1 is an illustrative representation of a conventional planarcapacitor memory structure.

FIG. 2 is an illustrative representation of a conventional stackedcapacitor memory structure.

FIG. 3 is an illustrative representation of a conventional trenchcapacitor memory structure.

FIG. 4 is a functional block diagram of an exemplary digital dataapparatus according to one embodiment.

FIG. 5 is a schematic representation of an exemplary memory structureaccording to one embodiment.

FIG. 6 is an illustrative representation of an exemplary configurationof the memory structure shown in FIG. 5.

FIG. 7 is a schematic representation of an exemplary memory structureaccording to one embodiment.

FIG. 8 is an illustrative representation of an exemplary configurationof the memory structure shown in FIG. 7.

FIG. 8A is an illustrative representation of another exemplaryconfiguration of the memory structure shown in FIG. 7.

FIG. 9 is a schematic representation of an exemplary memory structureaccording to one embodiment.

FIG. 10 is an illustrative representation of an exemplary configurationof the memory structure shown in FIG. 9.

FIG. 11 is a schematic representation of an exemplary memory structuregenerally corresponding to the memory structure of FIG. 10 in accordancewith another embodiment.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

This disclosure of the invention is submitted in furtherance of theconstitutional purposes of the U.S. Patent Laws “to promote the progressof science and useful arts” (Article 1, Section 8).

According to one embodiment, a digital data apparatus comprises asemiconductive substrate comprising a node location configured toreceive an electrical charge of a single bit of digital information, afirst capacitor coupled with the node location and configured to store afirst portion of the electrical charge of the single bit of digitalinformation, wherein the first capacitor comprises a first type ofcapacitive structure, a second capacitor coupled with the node locationand configured to store a second portion of the electrical charge of thesingle bit of digital information, wherein the second capacitorcomprises a second type of capacitive structure different than the firsttype of capacitive structure, and a transistor coupled with the nodelocation and configured to control a flow of the first and secondportions of the electrical charge of the single bit of digitalinformation with respect to the node location and respective ones of thefirst and the second capacitors.

According to another embodiment, a digital data apparatus comprises asemiconductive substrate, a first capacitor configured to store a firstelectrical charge, wherein the first capacitor comprises a first type ofcapacitive structure, a second capacitor configured to store a secondelectrical charge, wherein the second capacitor comprises a second typeof capacitive structure different than the first type of capacitivestructure, a common bitline configured to conduct the first and thesecond electrical charges, and a plurality of transistors formed usingthe semiconductive substrate and coupled with the bitline, wherein thetransistors are individually configured to control storage of arespective one of the first and the second electrical charges withrespect to a respective one of the first and the second capacitors.

According to an additional embodiment, a digital data apparatuscomprises a semiconductive substrate comprising a plurality of nodelocations, a first capacitor configured to store an electrical chargefor a first bit of digital information, wherein the first capacitorcomprises a first type of capacitive structure coupled with a first ofthe node locations, a second capacitor configured to store an electricalcharge for a second bit of digital information, wherein the secondcapacitor comprises a second type of capacitive structure different thanthe first type of capacitive structure and coupled with a second of thenode locations, a plurality of bitlines individually configured toconduct an electrical charge with respect to a respective one of thefirst and second node locations, and a plurality of transistors formedcoupled with respective ones of the bitlines, wherein the transistorsare individually configured to control a flow of the respectiveelectrical charges intermediate respective ones of the first and thesecond capacitors and the respective ones of the bitlines.

According to another additional embodiment, a digital data apparatuscomprises substrate means having an associated horizontal referenceline, first storage means for storing a first electrical chargecorresponding to a single bit of digital information, wherein the firststorage means is positioned elevationally above the horizontal referenceline, second storage means for storing a second electrical chargecorresponding to the single bit of digital information, wherein thesecond storage means is positioned elevationally below the horizontalreference line, and control means for selectively communicatingrespective ones of the first and the second electrical charges withrespect to respective ones of the first storage means and the secondstorage means.

According to yet another embodiment, a digital data apparatus comprisesmemory comprising a semiconductive substrate, a trench capacitorconfigured to store a first electrical charge, a stacked capacitorconfigured to store a second electrical charge, a common bitlineconfigured to conduct the first and the second electrical charges, and aplurality of transistors formed using the semiconductive substrate andcoupled with the bitline, wherein the transistors are individuallyconfigured to control storage of a respective one of the first and thesecond electrical charges with respect to a respective one of the firstand the second capacitors, and processing circuitry electrically coupledwith the memory and configured to control the generation of the firstand the second electrical charges.

According to still another embodiment, a digital data operational methodcomprises providing a plurality of capacitors comprising a plurality ofdifferent types of structures using a semiconductive substrate,communicating an electrical charge corresponding to a single bit ofdigital information using a bitline, storing the electrical charge ofthe single bit of digital information using plural ones of thecapacitors comprising different types of capacitive structures, andcontrolling communication of the electrical charge intermediate thecapacitors and the bitline using a transistor to read and write the bitof digital information with respect to the capacitors.

According to yet another additional embodiment, a digital dataoperational method comprises providing a plurality of capacitorscomprising different types of capacitive structures using asemiconductive substrate, communicating a plurality of electricalcharges using a common bitline coupled with the capacitors, storing oneof the electrical charges from the bitline using one of the capacitorshaving a first type of capacitive structure, and storing an other of theelectrical charges from the bitline using an other of the capacitorshaving a second type of capacitive structure different than the firsttype of capacitive structure.

Referring to FIG. 4, an exemplary digital data apparatus is illustratedwith respect to reference 100. The depicted digital data apparatus 100is configured to access, execute, modify, and/or store digital data.Digital data may comprise digitized representations of analog data orother information, executable instructions (e.g., software, firmware,etc.), or any other digital information represented as bits having aplurality of logical states (e.g., logical 0, logical 1).

In one embodiment, digital data apparatus 100 comprises processingcircuitry 102 and memory 104. Processing circuitry 102 is arranged toprocess and communicate (e.g., access and/or write) digital data withrespect to memory 104. For example, processing circuitry 102 may controla content of the bits of digital information individually comprising oneof a plurality of logical states. Alternatively, the content of the bitsmay be otherwise determined. Processing circuitry 102 may controlwriting of the bits to memory 104 and/or reading the bits from memory104. Processing circuitry 102 may be embodied as a microprocessor (e.g.,Pentium processor available from Intel Corporation), microcontroller,hardware logic, PGA, FPGA, ASIC, and/or other structure configured toprocess digital data.

Memory 104 is configured to store digital data received from anyappropriate source (e.g., processing circuitry 102), and to output thestored digital data. Exemplary memory 104 comprises dynamic randomaccess memory (DRAM) formed using a semiconductive substrate. Memory 104may comprise a plurality of storage locations or cells configured in anarray to store respective bits of digital information. A plurality ofbitlines and wordlines may be used to implement addressing of thestorage locations. Exemplary embodiments illustrating details of memory104 are described below with respect to FIGS. 5-11.

Referring to FIG. 5, an electrical schematic representation of a firstmemory structure 110 is shown. Memory structure 110 may be implementedwithin memory 104 to store digital information in one embodiment.

Structure 110 comprises a common wordline 112, a common bitline 114, atransistor 116 having a gate 117, and a plurality of capacitors 118, 120in the depicted example. Wordline 112 and bitline 114 are configured tocontrol reading and writing of digital data with respect to capacitors118, 120. Wordline 112 and/or bitline 114 may be referred to asconductive structures herein. Common conductive structures (wordline 112or bitline 114) refer to a structure common to or associated with bothcapacitors 118, 120. Structure 110 comprises a memory cell configured tostore a single bit of digital information using capacitors 118, 120 inthe illustrated embodiment. For example, capacitors 118, 120 may storerespective portions of an electrical signal or charge of the single bitof digital information. A single transistor 116 controls the storedcharge in both capacitors 118, 120 in the depicted exemplaryarrangement. Transistor 116 may be implemented as a field effecttransistor FET. Gate 117 of transistor 116 is coupled with wordline 112in the illustrated example. A source of transistor 116 is coupled withbitline 114 and a drain of transistor 116 may be coupled with arespective plate or pole of capacitors 118, 120 (e.g., the source anddrain are not specifically shown in FIG. 5). The other poles ofrespective capacitors 118, 120 may be coupled with ground. In oneembodiment, capacitors 118, 120 comprise different types of capacitivestructures. For example, capacitor 118 may comprise a stacked capacitorand capacitor 120 may comprise a trench capacitor 120 in one embodiment.

During exemplary write operations, charge may be communicated orsupplied via bitline 114. A voltage on wordline 112 results in currentflowing into respective capacitors 118, 120. For exemplary readoperations, electrical charge (if any) stored within capacitors 118, 120discharges to bitline 114 responsive to a voltage on wordline 112. Inthe illustrated example, capacitors 118, 120 of memory structure 100comprise a single storage node permitting one bit of digital informationto be stored.

Referring to FIG. 6, an exemplary physical representation of two firstmemory structures 110 is shown. First memory structures 110 areconfigured to individually store a single bit of digital information.Two structures 110 are illustrated to depict one possible fabricationimplementation wherein some common device structures (e.g., bitlinestructures) are shared between structures 110 to improve density. Thewordlines 112 may be separately and independently controlled in oneembodiment to provide respective read and write operations forindividual structures 110. Other arrangements are possible includingcoupling only one structure 110 per bitline structure. Furtheralternately, plural individual structures 110 may be controlled to sharean electrical charge of a single bit of digital information.

First memory structure 110 comprises a semiconductive substrate 130.Semiconductive substrates herein include constructions comprisingsemiconductive material, including, but not limited to, bulksemiconductive materials such as a semiconductive wafer (either alone orin assemblies comprising other materials thereon), and semiconductivematerial layers (either alone or in assemblies comprising othermaterials). The term substrate refers to any supporting structure,including, but not limited to, the semiconductive substrates describedabove. Exemplary semiconductive substrates described herein comprisep-type substrates or wells.

Interlayer dielectric material 132 is provided over the substrate 130 inthe illustrated example. Bitline material 134 is formed over at leastsome of dielectric material 132. A bitline contact 136 provides verticalelectrical communication of electrical signals in the depicted exemplaryconfiguration. Bitline material 134 and bitline contact 136 maycorrespond to bitline 114 of FIG. 5. Dielectric material 132 maycomprise BPSG and material 134 and contact 136 may comprise polysiliconand/or metal in one embodiment.

A plurality of active areas 140 are formed using the semiconductivesubstrate 130. Exemplary active areas described herein may comprise n+diffusion regions in one example. Field oxide regions 142 are formedintermediate substrate 130 and dielectric material 132 and may comprisesilicon dioxide. Field polysilicon regions 144 are formed adjacent fieldoxide regions 142. Wordline material 146 is formed adjacent to bitlinecontact 136. Wordline material 146 forms a plurality of wordlines 112for the respective memory structures 110. Exemplary wordlines 112comprise polysilicon with associated silicide intermediate respectiveinsulative spacers 148. Wordlines 112 have associated gate oxide regions150 and individually form a transistor 116 (wordlines 112 mayindividually comprise a gate 117 of transistor 116 of FIG. 5) withassociated adjacent active areas 140.

The memory structures 110 individually include a respective pair ofcapacitors 118, 120 as described with respect to FIG. 5. Exemplarycapacitors 118, 120 comprise different types of capacitive structuresand comprise a stacked capacitor and a trench capacitor, respectively,in the example of FIG. 6. An exemplary stacked capacitor comprises ametal-insulator-metal (MIM) capacitor.

Capacitors 118, 120 of a structure 110 are coupled with a respectivenode location 152. Node locations 152 may be individually implementedusing a respective active area 140 as shown in FIG. 6. Responsive tooperations of respective transistors 116, node locations 152 receiveelectrical charge (also referred to as electrical signals) from bitline114 and correspond to respective single bits of information. Capacitors118, 120 operate to store any electrical charge present at a respectivenode location 152 when the associated transistor 116 electricallyinsulates the respective pairs of capacitors 118, 120 from bitline 114.Transistors 116 are configured to control the flow of electrical chargeto and from the respective pairs of capacitors 118, 120 responsive tocontrol signals from appropriate addressing circuitry (not shown). Theaddressing circuitry may control transistors 116 to address therespective memory structures 110 at appropriate moments in time to sharethe common bitline 114.

Capacitors 118, 120 may store respective portions of an electricalcharge of a bit as mentioned above. In one embodiment, capacitors 118,120 are designed such that the electrical charge stored within onedevice is substantially equal to the electrical charge stored within theother device. Capacitor 118 may comprise a stacked capacitor asmentioned above and as shown in FIG. 6. Capacitor 118 configured as astacked capacitor comprises an electrical storage component comprising ametal or polysilicon storage structure 160, intermediate dielectriclayer 162, and a metal cell plate 164 in the depicted embodiment.

Capacitor 120 may comprise a trench capacitor as mentioned above and asshown in FIG. 6. Capacitor 120 configured as a trench capacitorcomprises an electrical storage component comprising a polysiliconstorage structure 170, an intermediate dielectric layer 172, and aheavily doped substrate region 174 in the depicted embodiment. Inexemplary trench constructions described herein, dielectric layer 172may comprise ONC dielectric material and heavily doped substrate regionsmay comprise n+ regions (e.g., in an exemplary arrangement having ap-type substrate or well). Pairs of capacitors 118, 120 of structures110 comprise respective cells individually configured to store a singlebit of digital information.

A horizontal reference line may be defined wherein a substantial portionof the storage component of capacitor 118 is formed elevationally abovethe horizontal reference line and a substantial portion of the storagecomponent of capacitor 120 is formed elevationally below the horizontalreference line. For example, the horizontal reference line maycorrespond to a surface 176 of substrate 130 in the depicted example.

Referring to FIG. 7, an electrical schematic representation of a secondmemory structure 200 is shown. Memory structure 200 may be implementedwithin memory 104 to store digital information in one embodiment.

Structure 200 comprises a plurality of separate wordlines 202, 204(e.g., separate wordlines 202, 204 correspond to respective capacitors216, 218), a single common shared bitline 206, a plurality oftransistors 208, 210 having respective gates 212, 214, and a pluralityof capacitors 216, 218 in the depicted exemplary arrangement. Structure200 comprises a plurality of memory cells individually corresponding toone of the capacitors 216, 218 and individually configured to store asingle bit of digital information. In one embodiment, capacitors 216,218 comprise different capacitive structures. For example, capacitor 216may comprise a stacked capacitor and capacitor 218 may comprise a trenchcapacitor in one embodiment. In the illustrated example, capacitors 216,218 of memory structure 200 comprise independent storage nodespermitting two bits of digital information to be stored at a singlelocation and using a single bitline 206.

FIG. 8 depicts an exemplary physical representation of second memorystructure 200 comprising plural capacitors 216, 218 individuallyconfigured to store a single bit of digital information. The illustratedexample shows one possible fabrication implementation wherein somecommon device structures (e.g., bitline structures) are shared toimprove density. Memory structure 200 may be arranged in one embodimentto provide capacitors 216, 218 in a checkerboard pattern (e.g., in anunillustrated plan view) wherein trench capacitors (e.g., 218) extendunder alternating stacked capacitors (e.g., 216) and stacked capacitorsare mushroom-shaped extending over adjacent trench capacitors. Otherarrangements are possible.

Second memory structure 200 comprises a semiconductive substrate 220.Interlayer dielectric material 222 and bitline material 224 are formedover semiconductive substrate 220. A bitline contact 226 providesvertical electrical communication of electrical signals. Bitline layer224 and bitline material 226 may correspond to bitline 206 of FIG. 7.

Plural active areas 230 are formed using substrate 220. Field oxideregions 232 may be provided intermediate substrate 220 and dielectricmaterial 222. Field polysilicon regions 234 are formed adjacent to fieldoxide regions 232. Wordline material 236 is formed adjacent to oppositesides of bitline contact 226. Wordline material 236 may comprisepolysilicon intermediate respective insulative spacers 238 and formwordlines 202, 204 of FIG. 7. Respective formations of wordline material236 are adjacent to associated gate oxide regions 240 and formrespective transistors 208, 210 (wordlines 236 may comprise gates 212,214 of FIG. 7) with associated adjacent active areas 230.

Memory structure 200 comprises capacitors 216, 218. As shown in theexemplary embodiment, capacitors 216, 218 respectively comprise astacked capacitor and a trench capacitor. Capacitors 216, 218individually operate to store a single bit of information responsive tooperation of respective transistors 208, 210.

Capacitor 216 configured as a stacked capacitor comprises an electricalstorage component comprising a metal or polysilicon storage structure250, intermediate dielectric layer 252, and a metal or polysilicon cellplate 254 in the depicted embodiment.

Capacitor 218 configured as a trench capacitor comprises an electricalstorage component comprising polysilicon storage structure 260,intermediate dielectric layer 262, and a heavily doped substrate region264 in the depicted embodiment. A polysilicon strap 266 may be providedto provide electrical communication between polysilicon storagestructure 260 and a drain of transistor 218.

Another horizontal reference line may be defined wherein a substantialportion of the storage component of capacitor 216 is formedelevationally above the horizontal reference line and a substantialportion of the storage component of capacitor 218 is formedelevationally below the horizontal reference line. The horizontalreference line may correspond to a surface 270 of substrate 220 in thedepicted example.

As mentioned previously, capacitors 216, 218 are coupled with and sharea single bitline 206. Transistors 216, 218 may be controlled by therespective wordlines 236 to selectively couple respective capacitors216, 218 with bitline 206 to enable different bits of information to bewritten to or accessed from capacitors 216, 218. For example, capacitor216 may only be coupled with bitline 206 at a first moment in time andcapacitor 218 may only be coupled with bitline 206 at a second moment intime. In other operational embodiments, both capacitors 216, 218 may besimultaneously coupled with bitline 206 to enable a single bit ofinformation to be written to or accessed from capacitors 216, 218.

Referring to FIG. 8A, an alternate configuration of the embodiment shownin FIG. 8 is illustrated as a memory structure 200 a. Like numeralscorrespond to like components with differences therebetween beingrepresented by a suffix, such as “a.” Structure 200 a comprises stackedcapacitor 216 and an alternate trench capacitor 218 a. Stacked andtrench capacitors 216, 218 a may be provided in a checkerboard patternsimilar to the construction of FIG. 8.

In the illustrated embodiment, trench capacitor 218 a is coupled with aburied transistor 208 a which is configured to control reading andwriting of data with respect to trench capacitor 218 a. Transistor 208 aassociated with trench capacitor 218 a is formed below surface 270 ofsemiconductive substrate 220 and adjacent a sidewall of the trench ofthe trench capacitor 218 a. Trench capacitor 218 a comprises apolysilicon storage structure 260 a, an intermediate dielectric layer262 a, and a heavily doped substrate region 264 a in the depictedembodiment.

Bitline contact 226 is configured to provide electrical connection withactive area 230 a. A passing wordline 280 and associated silicide 282provide control of data reading and writing to an adjacent memorystructure (not shown), for example, arranged in a checkerboard pattern.Active area 230 a extends an increased lateral distance towardscapacitor 218 a in the embodiment of FIG. 8A compared with theembodiment of FIG. 8.

Wordline material 236 a is illustrated elevationally over capacitor 218a and has associated silicide material 237. Wordline 236 a is configuredto control the operation of buried transistor 208 a including thereading and writing of data with respect to trench capacitor 218 a. Ashallow trench isolation region 286 is depicted for isolating node 260 afrom active region 230 a. A deep strap 288 comprising polysilicon isillustrated for establishing electrical connection with wordline 236 aand terminating adjacent to a gate 289 of transistor 208 a. An active(e.g., n+ region) region 231 is provided to create a channel region toselectively couple node 260 a with active area 230 a responsive tocontrol signals provided via wordline 236 a and deep strap 289.Transistor 208 a selectively couples node 260 a with active area 230 ain the depicted embodiment. An oxide collar 290 operates to insulateheavily doped substrate region 264 a of capacitor 218 a from region 231.Additional details regarding exemplary buried transistors 208 a aredescribed in “SEMICONDUCTORS: IBM, Infineon Open Trench Warfare Over1-Gbit Design,” listing Anthony Cataldo as author,http://www.eetimes.com/semi/news/OEG19991028S0038; Oct. 28, 1999, and “ANovel Trench DRAM Cell with a VERtIcal Access Transistor and BuriEdSTrap (VERY BEST) for 4 GB/16 Gb,” listing U. Gruening, C. J. Radens, J.A. Mandelman, A. Michaelis, M. Seitz, N. Arnold, D. Lea, D. Casarotto,A. Knorr, S. Halle, T. H. Ivers, L. Economikos, S. Kudelka, S. Raha, H.Tews, H. Lee, R. Divakaruni, J. J. Welser, T. Furukawa, T. S. Kanarsky,J. Alsmeier, G. B. Bronner as authors, printed September, 1999, theteachings of which are incorporated herein by reference. The structureof FIG. 8A has the potential of being a 4F² cell with maximumcapacitance in one embodiment. Buried transistors may be utilized inconjunction with other trench capacitor configurations, including thosedisclosed herein.

Referring to FIG. 9, an electrical schematic representation of anothermemory structure 300 is shown. Memory structure 300 may be implementedwithin memory 104 to store digital information in one embodiment.

Structure 300 comprises a plurality of separate wordlines 312, 313, aplurality of separate bitlines 314, 315, a plurality of transistors 316,317 having respective gates 318, 319 and a plurality of capacitors 320,321 in the depicted exemplary arrangement. Structure 300 comprises twoquasi-independent storage cells corresponding to capacitors 320, 321(e.g., using respective ones of independent wordlines 312, 313, bitlines314, 315 and associated with respective sense amplifiers (not shown)).For example, capacitor 320 may be arranged to store a first bit ofdigital information and capacitor 321 may be arranged to store a secondbit of digital information. Wordlines 312, 313 are configured to controlthe reading and writing of digital information of bitlines 314, 315 withrespect to respective capacitors 320, 321. Accordingly, capacitors 320,321 are individually configured to store an electrical signal or chargeof a respective bit of digital information in one arrangement. In theillustrated example, capacitors 320, 321 of memory structure 300comprise independent storage nodes permitting storage of two bits ofdigital information.

In one embodiment, capacitors 320, 321 comprise different capacitivestructures. For example, capacitor 320 may comprise a stacked capacitorwhile capacitor 321 may comprise a trench capacitor in one embodiment.The embodiment of FIG. 9 may have the largest tolerance of the disclosedembodiments for process variations inasmuch as any systematicdifferences of the capacitances of the capacitors 320, 321 should notsignificantly degrade system operability, with the downside of usingplural complete wiring systems of increased complexity compared with theother disclosed embodiments.

Referring to FIG. 10, an exemplary physical representation of memorystructure 300 is shown. Memory structure 300 comprises a semiconductivesubstrate 330 (e.g., p-type material). Interlayer dielectric material332 is provided to insulate conductive or semiconductive material. Firstbitline material 334 is provided coupled with a first bitline contact336. Bitline material 334 and bitline contact 336 may correspond tobitline 314 of FIG. 9. Second bitline material 338 is provided coupledwith a first bitline contact 340. Bitline material 338 and bitlinecontact 340 may correspond to bitline 315 of FIG. 9. As described below,structure 300 embodies plural capacitors 320, 321 of FIG. 9. Capacitors320, 321 may be formed laterally adjacent to one another as shown, andarranged in a checkerboard configuration (e.g., in an unillustrated planview). Bitlines 314, 315 may be offset from one another as illustratedby the partial view of bitline contact 340 in the exemplary embodimentof FIG. 10. Two separate conductive (e.g., metal) layers of bitlinematerial 334, 338 are shown. Other configurations are possible in otherdesign layouts.

A plurality of active areas 350 are formed using semiconductivesubstrate 330. Field oxide regions 352 are formed intermediate substrate330 and dielectric material 332. Active areas 350 coupled with bitlines314, 315 may comprise respective node locations 351, 353. Wordlinematerial 354, 356 is formed adjacent to respective bitline contacts 336,340. Wordline material 354, 356 may comprise polysilicon intermediaterespective insulative spacers 358, 360 and form wordlines 312, 313 ofFIG. 9. Wordline material 354, 356 has associated gate oxide regions362, 364 and form respective transistors 316, 317 (wordlines 312, 313may comprise gates 318, 319 of FIG. 9) with associated adjacent activeareas 350, respectively.

Memory structure 300 comprises capacitors 320, 321. As shown in theexemplary embodiment, capacitors 320, 321 respectively comprise astacked capacitor and a trench capacitor. Capacitors 320, 321individually operate to store a single bit of information responsive tooperation of respective transistors 316, 317.

Capacitor 320 configured as a stacked capacitor comprises an electricalstorage component comprising a metal or polysilicon storage structure370, intermediate dielectric layer 372, and a metal or polysilicon cellplate 374 in the depicted embodiment.

Capacitor 321 configured as a trench capacitor comprises an electricalstorage component comprising a polysilicon storage structure 380,intermediate dielectric layer 382, and a heavily doped substrate region384 in the depicted embodiment. A polysilicon strap 386 may be providedto provide electrical communication between polysilicon storagestructure 380 and a drain of transistor 317.

For FIG. 10, a horizontal reference line may be defined wherein asubstantial portion of the storage component of capacitor 320 is formedelevationally above the horizontal reference line and a substantialportion of the storage component of capacitor 321 is formedelevationally below the horizontal reference line. The horizontalreference line may correspond to a surface 390 of substrate 330 in thedepicted example.

As mentioned previously, capacitors 320, 321 are coupled with respectivebitlines 314, 315. Transistors 316, 317 may be controlled by therespective wordlines 312, 313 to selectively couple respectivecapacitors 320, 321 with respective bitlines 314, 315 to enabledifferent bits of information to be independently written to or readfrom capacitors 320, 321. Alternately, capacitors 320, 321 may store anelectrical charge of a single bit of digital information responsive tocontrol of transistors 316, 317.

Referring to FIG. 11, an electrical schematic representation of anothermemory structure 300 a is shown illustrating another embodiment of thememory structure 300 of FIGS. 9-10. Memory structure 300 may beimplemented within memory 104 to store digital information in oneembodiment.

Structure 300 comprises a common wordline 312 a, a plurality of separatebitlines 314, 315, a plurality of transistors 316, 317 having respectivegates 318, 319 and a plurality of capacitors 320, 321 in the depictedexemplary arrangement. Capacitor 320 may be arranged to store a firstbit of digital information corresponding to bitline 314 and capacitor321 may be arranged to store a second bit of digital informationcorresponding to bitline 315. Common wordline 312 a is configured tocontrol the reading and writing of digital information of bitlines 314,315 with respect to respective capacitors 320, 321. Wordline material354 and 356 of FIG. 10 may be commonly coupled in one arrangement toimplement the circuit of FIG. 11. Capacitors 320, 321 are individuallyconfigured to store an electrical signal or charge of a respective bitof digital information in one arrangement. In the illustrated example,capacitors 320, 321 of memory structure 300 a comprise independentstorage nodes permitting two bits of digital information to be stored.

In accordance with exemplary processing to produce structures describedherein, trench capacitor constructions may be initially fabricatedwithin an underlying substrate. If desired, associated trenchtransistors may be fabricated during the fabrication of the trenchcapacitors. A plurality (e.g., one to four) levels of buried wiring forproviding desired electrical connections may be constructed during orfollowing the fabrication of trench or other buried structures.Exemplary buried wiring fabrication procedures are described in U.S.Published Patent Application No. US 2002/0009874 A1, having Ser. No.09/930,521, filed Aug. 15, 2001, listing Paul A. Farrar and Wendell P.Noble as inventors, the teachings of which are incorporated by referenceherein. Following formation of buried devices, planar transistors,stacked capacitors, additional conductive connections, or other desiredstructures may be constructed. Different wiring configurations may beused including buried or split wiring corresponding to the arrangementof the memory structure being fabricated. In one embodiment, capacitorshaving different capacitive types are fabricated using pluralinter-penetrating arrays corresponding to the respective types ofcapacitive constructions. In another embodiment, a single array havingalternating types of capacitive structures may be used.

In compliance with the statute, the invention has been described inlanguage more or less specific as to structural and methodical features.It is to be understood, however, that the invention is not limited tothe specific features shown and described, since the means hereindisclosed comprise preferred forms of putting the invention into effect.The invention is, therefore, claimed in any of its forms ormodifications within the proper scope of the appended claimsappropriately interpreted in accordance with the doctrine ofequivalents.

1. A digital data apparatus comprising: a semiconductive substratecomprising a node location configured to receive an electrical charge ofa single bit of digital information; a first capacitor coupled with thenode location and configured to store a first portion of the electricalcharge of the single bit of digital information, wherein the firstcapacitor comprises a first type of capacitive structure; a secondcapacitor coupled with the node location and configured to store asecond portion of the electrical charge of the single bit of digitalinformation, wherein the second capacitor comprises a second type ofcapacitive structure different than the first type of capacitivestructure; and a transistor coupled with the node location andconfigured to control a flow of the first and second portions of theelectrical charge of the single bit of digital information with respectto the node location and respective ones of the first and the secondcapacitors.
 2. The apparatus of claim 1 wherein a substantial portion ofa storage component of the first capacitor is elevationally above ahorizontal reference line and a substantial portion of a storagecomponent of the second capacitor is elevationally below the horizontalreference line.
 3. The apparatus of claim 2 wherein the horizontalreference line comprises a surface of the semiconductive substrate. 4.The apparatus of claim 1 wherein the first type of capacitive structurecomprises a stacked capacitor, and the second type of capacitivestructure comprises a trench capacitor.
 5. The apparatus of claim 1wherein the first and the second capacitors comprise a cell configuredto store the single bit of digital information.
 6. The apparatus ofclaim 1 further comprising a common bitline, and wherein both of thefirst and the second capacitors are coupled with the common bitline viathe transistor.
 7. The apparatus of claim 6 wherein the first and thesecond capacitors comprise a first capacitor pair, and furthercomprising a second capacitor pair coupled with the bitline via anothertransistor.
 8. The apparatus of claim 1 further comprising processingcircuitry coupled with the bitline and configured to control a contentof the single bit of digital information comprising one of a pluralityof logical states.
 9. The apparatus of claim 1 further comprisingprocessing circuitry configured to access the single bit of digitalinformation from the first and the second capacitors.
 10. The apparatusof claim 1 further comprising processing circuitry configured to controlwriting of the single bit of digital information to the first and thesecond capacitors.
 11. A digital data apparatus comprising: asemiconductive substrate; a first capacitor configured to store a firstelectrical charge, wherein the first capacitor comprises a first type ofcapacitive structure; a second capacitor configured to store a secondelectrical charge, wherein the second capacitor comprises a second typeof capacitive structure different than the first type of capacitivestructure; a common bitline configured to conduct the first and thesecond electrical charges; and a plurality of transistors formed usingthe semiconductive substrate and coupled with the bitline, wherein thetransistors are individually configured to control storage of arespective one of the first and the second electrical charges withrespect to a respective one of the first and the second capacitors. 12.The apparatus of claim 11 wherein the first and the second electricalcharges correspond to different bits of digital information.
 13. Theapparatus of claim 11 wherein the first and the second electricalcharges correspond to a single bit of digital information.
 14. Theapparatus of claim 11 wherein the first type of capacitive structurecomprises a stacked capacitor, and the second type of capacitivestructure comprises a trench capacitor.
 15. The apparatus of claim 11wherein one of the first and the second capacitors comprises a trenchcapacitor, and a respective one of the transistors associated with thetrench capacitor is formed below a surface of the semiconductivesubstrate adjacent a sidewall of a trench of the trench capacitor. 16.The apparatus of claim 11 further comprising processing circuitrycoupled with the bitline and configured to individually control thefirst and the second electrical charges to individually correspond toone of a plurality of logical states.
 17. A digital data apparatuscomprising: a semiconductive substrate; first capacitor configured tostore a first electrical charge, wherein the first capacitor comprises afirst type of capacitive structure; a second capacitor configured tostore a second electrical charge, wherein the second capacitor comprisesa second type of capacitive structure different than the first type ofcapacitive structure; a common conductive structure configured to effectstorage of the first and the second electrical charges using respectiveones of the first capacitor and the second capacitor; and a plurality oftransistors formed using the semiconductive substrate and individuallyassociated with one of the first capacitor and the second capacitor. 18.The apparatus of claim 17 wherein the common conductive structurecomprises a bitline configured to conduct the first and the secondelectrical charges.
 19. The apparatus of claim 17 wherein the commonconductive structure comprises a wordline configured to control anoperation of the transistors.
 20. The apparatus of claim 17 wherein thefirst type of capacitive structure comprises a stacked capacitor, andthe second type of capacitive structure comprises a trench capacitor.21-46. (canceled)